DSpace at KIST: 스파터링 조건이 Co-Hf-Pd 박막의 특성에 미치는 영향

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DC Field	Value	Language
dc.contributor.author	한석희	-
dc.contributor.author	김희중	-
dc.contributor.author	노태환	-
dc.contributor.author	강일구	-
dc.contributor.author	이정중	-
dc.date.accessioned	2024-01-22T00:11:40Z	-
dc.date.available	2024-01-22T00:11:40Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1990-11	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/147024	-
dc.title	스파터링 조건이 Co-Hf-Pd 박막의 특성에 미치는 영향	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	Korean Applied Physics (Korean Physical Society), v.4, no.4, pp.523 - 528	-
dc.citation.title	Korean Applied Physics (Korean Physical Society)	-
dc.citation.volume	4	-
dc.citation.number	4	-
dc.citation.startPage	523	-
dc.citation.endPage	528	-
dc.subject.keywordAuthor	Co alloy	-
dc.subject.keywordAuthor	thin film	-
dc.subject.keywordAuthor	sputtering	-

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