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산업전자에 응용되는 실리콘 IC 센서

Authors

주병권; 오명환

Issue Date

1990-11

Citation

경영과 자동화지, pp.22

Keywords

MEMS; micromachining; microsensor

URI

https://pubs.kist.re.kr/handle/201004/147031

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KIST Article > Others

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