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순철박막의 증착속도 , 미세구조 및 자성에 미치는 스퍼터링조건의 영향

Authors

한석희; 김희중; 강일구; 최정옥; 이정중

Issue Date

1990-11

Citation

Journal of Korean Magnetic Society, v.1, no.2, pp.22 - 30

Keywords

Fe; thin film; sputtering

URI

https://pubs.kist.re.kr/handle/201004/147032

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KIST Article > Others

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