Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 강광남 | - |
dc.contributor.author | 이정일 | - |
dc.contributor.author | 이명복 | - |
dc.contributor.author | 주병권 | - |
dc.contributor.author | 김형곤 | - |
dc.contributor.author | 오명환 | - |
dc.date.accessioned | 2024-01-22T00:12:16Z | - |
dc.date.available | 2024-01-22T00:12:16Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 1990-11 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/147034 | - |
dc.title | Fabrication and characterization of miniature Si pressure sensor. | - |
dc.title.alternative | 소형 Si 압력센서의 제작 및 특성 평가 = | - |
dc.type | Article | - |
dc.description.journalClass | 3 | - |
dc.identifier.bibliographicCitation | 전자공학회논문지, v.v. 27, no.no. 11, pp.62 - 68 | - |
dc.citation.title | 전자공학회논문지 | - |
dc.citation.volume | v. 27 | - |
dc.citation.number | no. 11 | - |
dc.citation.startPage | 62 | - |
dc.citation.endPage | 68 | - |
dc.subject.keywordAuthor | pressure sensor | - |
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