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CVD 법에 의한 Diamond film 합성

Authors

은광용; 백영준; 이욱성

Issue Date

1990-01

Citation

요업재료의 과학과 기술, v.5, no.2, pp.133 - 144

Keywords

CVD 다이아몬드 막

URI

https://pubs.kist.re.kr/handle/201004/147170

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KIST Article > Others

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