DSpace at KIST: Consideration on the anisotropic etching states of Si and application to the fabrication of micromechanic structures for integrated sensor.

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DC Field	Value	Language
dc.contributor.author	김형곤	-
dc.contributor.author	오명환	-
dc.contributor.author	주병권	-
dc.contributor.author	이윤희	-
dc.date.accessioned	2024-01-22T00:36:39Z	-
dc.date.available	2024-01-22T00:36:39Z	-
dc.date.created	2022-01-10	-
dc.date.issued	1990-01	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/147215	-
dc.title	Consideration on the anisotropic etching states of Si and application to the fabrication of micromechanic structures for integrated sensor.	-
dc.title.alternative	실리콘의 비등방성 식각상태의 고찰과 집적 센서용 미세기계 구조 제작에의 응용 =	-
dc.type	Article	-
dc.description.journalClass	3	-
dc.identifier.bibliographicCitation	전자학회 논문지, v.제 39 권, pp.75 - 82	-
dc.citation.title	전자학회 논문지	-
dc.citation.volume	제 39 권	-
dc.citation.startPage	75	-
dc.citation.endPage	82	-

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