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실리콘질화박막 (SiNx) 성장을 위한 하향흐름 마이크로 웨이브 플라즈마의 특성 분석 .

Authors

김용태; 김춘근; 민석기

Issue Date

1989-01

Citation

응용물리, v.v. 2, pp.142 - 146

URI

https://pubs.kist.re.kr/handle/201004/147398

Appears in Collections:

KIST Article > Others

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