Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김성일 | - |
dc.contributor.author | 김은규 | - |
dc.contributor.author | 김용태 | - |
dc.contributor.author | 김춘근 | - |
dc.contributor.author | 김무성 | - |
dc.contributor.author | 민석기 | - |
dc.date.accessioned | 2024-01-22T01:04:11Z | - |
dc.date.available | 2024-01-22T01:04:11Z | - |
dc.date.created | 2022-01-10 | - |
dc.date.issued | 1989-01 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/147454 | - |
dc.title | 이온주입된 실리콘의 excimer laser annealing 효과 . | - |
dc.type | Article | - |
dc.description.journalClass | 3 | - |
dc.identifier.bibliographicCitation | 응용물리, v.v. 2, no.no. 2, pp.129 - 135 | - |
dc.citation.title | 응용물리 | - |
dc.citation.volume | v. 2 | - |
dc.citation.number | no. 2 | - |
dc.citation.startPage | 129 | - |
dc.citation.endPage | 135 | - |
dc.subject.keywordAuthor | laser annealing | - |
dc.subject.keywordAuthor | silicon | - |
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