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dc.contributor.author김성일-
dc.contributor.author김은규-
dc.contributor.author김용태-
dc.contributor.author김춘근-
dc.contributor.author김무성-
dc.contributor.author민석기-
dc.date.accessioned2024-01-22T01:04:11Z-
dc.date.available2024-01-22T01:04:11Z-
dc.date.created2022-01-10-
dc.date.issued1989-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/147454-
dc.title이온주입된 실리콘의 excimer laser annealing 효과 .-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitation응용물리, v.v. 2, no.no. 2, pp.129 - 135-
dc.citation.title응용물리-
dc.citation.volumev. 2-
dc.citation.numberno. 2-
dc.citation.startPage129-
dc.citation.endPage135-
dc.subject.keywordAuthorlaser annealing-
dc.subject.keywordAuthorsilicon-
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