Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김용태 | - |
| dc.contributor.author | 민석기 | - |
| dc.contributor.author | 김춘근 | - |
| dc.date.accessioned | 2024-01-22T01:15:11Z | - |
| dc.date.available | 2024-01-22T01:15:11Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1988-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/147634 | - |
| dc.title | 텅스텐 할로겐 램프에 의한 절연층상의 실리콘박막급속열처리 . | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 전자공학회논문지, v.v. 25, pp.952 - 957 | - |
| dc.citation.title | 전자공학회논문지 | - |
| dc.citation.volume | v. 25 | - |
| dc.citation.startPage | 952 | - |
| dc.citation.endPage | 957 | - |
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