Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안광덕 | - |
| dc.date.accessioned | 2024-01-22T02:02:27Z | - |
| dc.date.available | 2024-01-22T02:02:27Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1985-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/147980 | - |
| dc.title | Polymer materials in semiconductor manufacturing. | - |
| dc.title.alternative | 반도체 제조용 고분자 소재 = | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 화학과 공업의 진보, v.v. 25, no.no. 7, pp.495 - 495 | - |
| dc.citation.title | 화학과 공업의 진보 | - |
| dc.citation.volume | v. 25 | - |
| dc.citation.number | no. 7 | - |
| dc.citation.startPage | 495 | - |
| dc.citation.endPage | 495 | - |
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