Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안광덕 | - |
| dc.date.accessioned | 2024-01-22T02:05:12Z | - |
| dc.date.available | 2024-01-22T02:05:12Z | - |
| dc.date.created | 2022-01-10 | - |
| dc.date.issued | 1984-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/148023 | - |
| dc.title | Resist materials for VLSI lithography. | - |
| dc.title.alternative | 고집적 반도체 미세가공용 레지스트 = | - |
| dc.type | Article | - |
| dc.description.journalClass | 3 | - |
| dc.identifier.bibliographicCitation | 대한전자공학잡지, v.v. 11, no.no. 5, pp.75 - 87 | - |
| dc.citation.title | 대한전자공학잡지 | - |
| dc.citation.volume | v. 11 | - |
| dc.citation.number | no. 5 | - |
| dc.citation.startPage | 75 | - |
| dc.citation.endPage | 87 | - |
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