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Nitrogen implanted tungsten thin films for Cu diffusion barrier.

Other Titles

Nitrogen implanted tungsten thin films for Cu diffusion barrier.

Authors

Kim Yong Tae; D. J. Kim; C. S. Kwon; I. H. Choi; Min Suk-Ki

Issue Date

1994-01

URI

https://pubs.kist.re.kr/handle/201004/148929

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KIST Publication > Others

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