Recent FIB applications for TEM works of thin films

Authors
Ahn, Jae PyoungKim Kyou HyunYoon Sang Won
Issue Date
2008-10
Keywords
FIB; TEM; TEM sampling; Nano patterning; Contamination
ISSN
-
URI
https://pubs.kist.re.kr/handle/201004/149007
Appears in Collections:
KIST Publication > 2008
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