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Recent FIB applications for TEM works of thin films

Authors

Ahn, Jae Pyoung; Kim Kyou Hyun; Yoon Sang Won

Issue Date

2008-10

Keywords

FIB; TEM; TEM sampling; Nano patterning; Contamination

ISSN

-

URI

https://pubs.kist.re.kr/handle/201004/149007

Appears in Collections:

KIST Publication > 2008

Files in This Item:

Nam 9 sample_FIB article.pdf(1.99 MB)Download

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