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레이져를 이용한 실리콘 나노구조 제조방법

Author

김인호; 이도권; 이경석; 이영석; 박종길; 정연주; 김재욱; 박성식; 황규원

Assignee

한국과학기술연구원

Regitration Date

2024-09-24

Registration No.

10-2710865

Application Date

2023-01-13

Application No.

10-2023-0005391

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/150735

Appears in Collections:

KIST Patent > 2023

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