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크기 변화가 용이한 금속 초박막 기반 실리콘 근적외선 포토다이오드 어레이 제작 기술

Author

김종범; 김근필; 이관일

Assignee

한국과학기술연구원

Regitration Date

2024-11-21

Registration No.

10-2734367

Application Date

2023-12-26

Application No.

10-2023-0191667

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/151183

Appears in Collections:

KIST Patent > 2023

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