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에피택시 산화물 박막의 제조방법 및 그로부터 제조된 결정질이 향상된 에피택시 산화물 박막

Author

백승협; 최형진; 허성훈; 장지수; 윤정호; 이병철; 송현철; 강종윤; 최지원; 김진상; 김성근

Assignee

한국과학기술연구원

Regitration Date

2024-07-18

Registration No.

10-2687727

Application Date

2021-11-11

Application No.

10-2021-0154425

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/152726

Appears in Collections:

KIST Patent > 2021

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