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얇은 게이트 산화막의 터널링 특성 분석 방법

Author

고은정; 최정혜

Assignee

한국과학기술연구원

Regitration Date

2020-07-29

Registration No.

10-2140968

Application Date

2018-10-25

Application No.

10-2018-0128129

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/76176

Appears in Collections:

KIST Patent > Others

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