알루미나 완충층을 포함하는 고밀도의 압전 후막 및 그 제조방법

Author
최지원신태희송현철윤석진
Assignee
한국과학기술연구원
Regitration Date
2013-08-29
Registration No.
1303924
Application Date
2011-11-28
Application No.
2011-0125270
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/77503
Appears in Collections:
KIST Patent > Others
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