DSpace at KISTKIST Patent2012

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dc.contributor.author손지원-
dc.contributor.author박정훈-
dc.contributor.author윤경중-
dc.contributor.author제해준-
dc.contributor.author이해원-
dc.contributor.author김병국-
dc.contributor.author이종호-
dc.date.accessioned2024-01-12T07:11:38Z-
dc.date.available2024-01-12T07:11:38Z-
dc.date.issued2015-03-09-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/80610-
dc.title분할 타겟 펄스 레이저 증착 장치 및 이를 이용한 초박막 다층구조 증착 방법-
dc.typePatent-
dc.date.registration2015-03-09-
dc.date.application2012-11-22-
dc.identifier.patentRegistrationNumber10-1502449-
dc.identifier.patentApplicationNumber10-2012-0132942-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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