KIST Library Institutional Repository

분할 타겟 펄스 레이저 증착 장치 및 이를 이용한 초박막 다층구조 증착 방법

Author

손지원; 박정훈; 윤경중; 제해준; 이해원; 김병국; 이종호

Assignee

한국과학기술연구원

Regitration Date

2015-03-09

Registration No.

10-1502449

Application Date

2012-11-22

Application No.

10-2012-0132942

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/80610

Appears in Collections:

KIST Patent > 2012

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