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단결정실리콘 시소동작 미소거울 어레이 및 그 제조방법

Author

신현준; 문성욱

Assignee

한국과학기술연구원

Regitration Date

2007-03-14

Registration No.

0697715

Application Date

2004-10-16

Application No.

2004-0082894

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/81331

Appears in Collections:

KIST Patent > 2004

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