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직류전원플라즈마화학증착법에　의한　다이아몬드막　합성장치

Author

이재갑; 은광용; 백영준

Assignee

한국과학기술연구원

Regitration Date

2002-09-03

Registration No.

6,443,092

Application Date

2000-05-02

Application No.

09/563,481

Country

US

URI

https://pubs.kist.re.kr/handle/201004/82306

Appears in Collections:

KIST Patent > 2000

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