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Electrical properties of PZT-PCW thick film on Pt/SiC/Si, and structural stability of SiCas buffer layer

Authors

CHOI KI YONG; Duck-kyun Choi; Ji-Yeun Park; Yoon, Dae Sung; Kim, Tae Song

Issue Date

2004-04

Citation

ISIF 2004

Keywords

SiC membrane; PZT-PCW; electrical property; structural stability

URI

https://pubs.kist.re.kr/handle/201004/82582

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KIST Conference Paper > 2004

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