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A Low-Voltage Three-Axis Electromagnetically Actuated Micromirror for High Coupling Efficiency

Authors

CHO, IL JOO

Issue Date

2003-08-15

Publisher

IEEE

Citation

Proceedings of IEEE International Conference on Optical MEMS, pp.123 - 124

URI

https://pubs.kist.re.kr/handle/201004/82691

Appears in Collections:

KIST Conference Paper > 2003

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