Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | CHOI, WON KOOK | - |
| dc.date.accessioned | 2024-01-12T08:46:48Z | - |
| dc.date.available | 2024-01-12T08:46:48Z | - |
| dc.date.created | 2022-01-14 | - |
| dc.date.issued | 2003-08-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/82697 | - |
| dc.title | Surface smoothing and etching by gas cluster ion beam | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | AIP, pp.745 - 749 | - |
| dc.citation.title | AIP | - |
| dc.citation.startPage | 745 | - |
| dc.citation.endPage | 749 | - |
| dc.relation.isPartOf | Application of Accelerator in Reseach and Industry: 17th Int'l. Conf. - 직접입력 | - |
- Appears in Collections:
- KIST Conference Paper > 2003
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