DSpace at KISTKIST Patent2009

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dc.contributor.author이중기-
dc.contributor.author조병원-
dc.contributor.author이화영-
dc.contributor.author김형석-
dc.contributor.author우주만-
dc.contributor.author장원영-
dc.contributor.author유경선-
dc.contributor.author이상득-
dc.date.accessioned2024-01-12T10:02:56Z-
dc.date.available2024-01-12T10:02:56Z-
dc.date.issued2011-07-20-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84010-
dc.title반도체생산 공정에서 배출되는 함불소가스를 효과적으로 분해하기 위한 흡착농축시스템과 결합된 열분해복합공정 기술-
dc.typePatent-
dc.date.registration2011-07-20-
dc.date.application2009-05-29-
dc.identifier.patentRegistrationNumber10-1052064-
dc.identifier.patentApplicationNumber2009-0047382-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2009
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