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dc.contributor.authorMoon, Sung Wook-
dc.date.accessioned2024-01-12T10:07:40Z-
dc.date.available2024-01-12T10:07:40Z-
dc.date.created2022-01-14-
dc.date.issued2001-01-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84197-
dc.titleA novel UV-LIGA process using PMER as a mold material for optical switch application-
dc.typeConference-
dc.description.journalClass1-
dc.relation.isPartOfInternational conference on Solid-State Sensors and Actuators-

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