Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeong, Jeung hyun | - |
| dc.date.accessioned | 2024-01-12T10:08:16Z | - |
| dc.date.available | 2024-01-12T10:08:16Z | - |
| dc.date.created | 2022-01-14 | - |
| dc.date.issued | 2001-01-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/84224 | - |
| dc.title | An analytical model for intrinsic stress effect on out-of-plane deflection of a chemical vapor deposited thick films | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Materials Research Society, Boston, USA | - |
| dc.citation.title | Materials Research Society, Boston, USA | - |
| dc.relation.isPartOf | Materials Research Society Proceedings | - |
- Appears in Collections:
- KIST Conference Paper > 2001
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