DSpace at KISTKIST Conference Paper2000

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dc.contributor.authorJeong, Jeung hyun-
dc.date.accessioned2024-01-12T10:12:25Z-
dc.date.available2024-01-12T10:12:25Z-
dc.date.created2022-01-14-
dc.date.issued2000-01-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84418-
dc.titleEvaluation of residual stress in diamond film through advanced analytic model for substrate curvature method-
dc.typeConference-
dc.description.journalClass1-
dc.relation.isPartOfGordon research conference on thin film mechanical behavior-
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KIST Conference Paper > 2000
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