KIST Library Institutional Repository

열충격내성이　개량된　반도체　웨이퍼처리용　탄화규소　피복　흑연치구　및　그의　제조방법

Author

김영욱; 김인섭; 박성훈; 이준근

Assignee

한국과학기술연구원

Regitration Date

1997-06-16

Registration No.

0116430

Application Date

1993-11-27

Application No.

1993-0025547

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85054

Appears in Collections:

KIST Patent > Others

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