KIST Library Institutional Repository

화학증착시스템에서　배출되는　미반응　유독가스의　정화　장치　및　방법

Author

박달근; 우주만; 이중기

Assignee

한국과학기술연구원

Regitration Date

1999-10-13

Registration No.

0238387

Application Date

1998-01-13

Application No.

1998-0000641

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85151

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML