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이온주입용 마스크 형성방법 및 이를 이용한 점결함 센터 형성 방법

Author

정호중; 황태연; 문성욱; 한상욱; 전승우; 조영욱; 임향택; 이승우; 이정현; 김용수

Assignee

한국과학기술연구원

Regitration Date

2022-10-19

Registration No.

10-2458001

Application Date

2020-09-24

Application No.

10-2020-0124081

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85604

Appears in Collections:

KIST Patent > 2020

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