DSpace at KISTKIST Patent2010

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dc.contributor.author김일두-
dc.contributor.author김동훈-
dc.contributor.author송용원-
dc.date.accessioned2024-01-12T12:35:13Z-
dc.date.available2024-01-12T12:35:13Z-
dc.date.issued2012-05-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/86937-
dc.title상온에서 증착된 Mg2Hf5O12를 포함하는 유전체 박막, 이를 포함하는 캐퍼시터 및 트랜지스터와 이들의 제조방법-
dc.typePatent-
dc.date.registration2012-05-02-
dc.date.application2010-01-08-
dc.identifier.patentRegistrationNumber1144015-
dc.identifier.patentApplicationNumber2010-0001962-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2010
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