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dc.contributor.author김태영-
dc.contributor.author이철승-
dc.contributor.author이광렬-
dc.date.accessioned2024-01-12T13:03:16Z-
dc.date.available2024-01-12T13:03:16Z-
dc.date.issued2006-08-08-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87407-
dc.title아르곤 가스를 이용하여 기계적, 전기적 물성이 개질된 경질 탄소박막과 그 제조방법-
dc.typePatent-
dc.date.registration2006-08-08-
dc.date.application2005-01-14-
dc.identifier.patentRegistrationNumber0612914-
dc.identifier.patentApplicationNumber2005-0003859-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2005
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