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아르곤 가스를 이용하여 기계적, 전기적 물성이 개질된 경질 탄소박막과 그 제조방법

Author

김태영; 이철승; 이광렬

Assignee

한국과학기술연구원

Regitration Date

2006-08-08

Registration No.

0612914

Application Date

2005-01-14

Application No.

2005-0003859

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/87407

Appears in Collections:

KIST Patent > 2005

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