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화학증착법을　이용한　티타늄　산화물　박막의　제조방법

Author

주오심; 이은호; C.D.LOKHANDE; 정광덕

Assignee

한국과학기술연구원

Regitration Date

2006-02-20

Registration No.

0555293

Application Date

2003-12-02

Application No.

2003-0086681

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/87472

Appears in Collections:

KIST Patent > 2003

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