KIST Library Institutional Repository

텅스텐　박막제조용　플라즈마　화학증착온도　측정장치

Author

김용태; 민석기

Assignee

한국과학기술연구원

Regitration Date

1993-08-03

Registration No.

5,232,509

Application Date

1992-07-08

Application No.

07/910,061

Country

US

URI

https://pubs.kist.re.kr/handle/201004/87936

Appears in Collections:

KIST Patent > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML