고밀도 직류글로우 방전에 의한 다이아몬드막 증착방법

Author
이욱성은광용백영준
Assignee
한국과학기술연구원
Regitration Date
1996-10-10
Registration No.
105960
Application Date
1993-12-29
Application No.
93-30636
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/87994
Appears in Collections:
KIST Patent > Others
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