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화학증착장치용　히터

Author

민석기; 김용; 김성일; 김무성

Assignee

한국과학기술연구원

Regitration Date

1997-07-15

Registration No.

5,648,006

Application Date

1995-02-09

Application No.

08/385,968

Country

US

URI

https://pubs.kist.re.kr/handle/201004/87995

Appears in Collections:

KIST Patent > Others

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