Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Baik, Young Joon | - |
| dc.contributor.author | 임관원 | - |
| dc.contributor.author | Shim Young Sub | - |
| dc.contributor.author | 허주열 | - |
| dc.contributor.author | 이재훈 | - |
| dc.contributor.author | JONG-KEUK, PARK | - |
| dc.contributor.author | Lee, Wook Seong | - |
| dc.date.accessioned | 2024-01-12T13:42:31Z | - |
| dc.date.available | 2024-01-12T13:42:31Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/88360 | - |
| dc.language | English | - |
| dc.publisher | International Conference on Plasma Surface Engineering, 9.12~16, 독일 | - |
| dc.title | Superhad SiC thin film deposited by UBM sputtering method | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | PSE2016 | - |
| dc.citation.title | PSE2016 | - |
| dc.citation.conferencePlace | GW | - |
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