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Superhad SiC thin film deposited by UBM sputtering method

Authors

Baik, Young Joon; 임관원; Shim Young Sub; 허주열; 이재훈; JONG-KEUK, PARK; Lee, Wook Seong

Publisher

International Conference on Plasma Surface Engineering, 9.12~16, 독일

Citation

PSE2016

URI

https://pubs.kist.re.kr/handle/201004/88360

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KIST Conference Paper > Others

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