KIST Library Institutional Repository

마스크 패턴 검사용 3차원 영상 획득 시스템 및 그 방법

Author

전영민; 황정민; 장지웅; 박민철; 이택진; 김선호; 이석; 김재헌; 우덕하

Assignee

한국과학기술연구원

Regitration Date

2013-05-02

Registration No.

10-1262269

Application Date

2011-08-10

Application No.

2011-0079483

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/89736

Appears in Collections:

KIST Patent > 2011

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML