반도체 검사용 수직형 프로브 및 이 프로브를 구비한 프로브 카드 및 그 제조방법

Author
문성욱이승훈추성일김진혁
Assignee
한국과학기술연구원
Regitration Date
2008-08-08
Registration No.
10-0852514
Application Date
2006-07-31
Application No.
2006-72402
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/90248
Appears in Collections:
KIST Patent > 2006
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