AlN 열방출층 및 TiN 전극이 적용된 상변화 메모리

Author
김성일김용태김인수김춘근염민수김영환
Assignee
한국과학기술연구원
Regitration Date
2011-04-15
Registration No.
4724550
Application Date
2005-12-16
Application No.
2005-363771
Country
JA
URI
https://pubs.kist.re.kr/handle/201004/90355
Appears in Collections:
KIST Patent > 2005
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