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Actinic EUV Mask Inspection using Coherent EUV Source based on High-order Harmonic Generation

Authors

Kim Yong Soo; Park June; Park Han Young; Hamin Sung; Jomsool Kim; Seung Beom Lee; Hyun Woo Cho; Ju Han Lee; Park, Min-Chul; Jhon, Young Min

Citation

Conference on Laser and Electro-Optics Pacific Rim(CLEO-PR), v.26F2-4, pp.1 - 2

Keywords

CSM; HHG; EUV; EUV Mask Inspection; Coherence

URI

https://pubs.kist.re.kr/handle/201004/90466

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KIST Conference Paper > Others

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