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Characteristic Analysis of Coherent EUV Light Source based on High-order Harmonic Generation

Other Titles

고차조화파 생성 기반의 극자외선 광원 특성 분석

Authors

Kim Yong Soo; Park June; Kim Younghee; 성하민; 김점술; 이승범; 조현우; Cho, Woon Jo; Kim, Yong Tae; 이주한; Jhon, Young Min

Citation

차세대 리소그래피 학술대회, v.F2-II-1, pp.44 - 45

Keywords

EUV; HHG; Nonlinear

URI

https://pubs.kist.re.kr/handle/201004/90469

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KIST Conference Paper > Others

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