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dc.contributor.authorJhon, Young Min-
dc.contributor.authorKim Yong Soo-
dc.contributor.authorAhn Joonmo-
dc.contributor.authorSung, Hamin-
dc.contributor.authorCho, Woon Jo-
dc.contributor.authorPark, Min-Chul-
dc.contributor.authorKim, Jomsool-
dc.contributor.authorLee, Ju Han-
dc.contributor.authorKIM, JAE HUN-
dc.contributor.authorMINAH SEO-
dc.contributor.authorLee, Seok-
dc.contributor.authorKim, Yong Tae-
dc.date.accessioned2024-01-12T16:04:54Z-
dc.date.available2024-01-12T16:04:54Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/91106-
dc.languageEnglish-
dc.subjectEUV-
dc.subjectMask Inspection-
dc.subjectCoherent-
dc.titleOutput Characteristics of a Coherent EUV Light Source for EUV Mask Inspection-
dc.title.alternative극자외선 마스크 검사용 결맞는 극자외선 광원의 출력특성-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation차세대 리소그래피 학술대회, pp.57 - 58-
dc.citation.title차세대 리소그래피 학술대회-
dc.citation.startPage57-
dc.citation.endPage58-
dc.citation.conferencePlaceKO-
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