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Output Characteristics of a Coherent EUV Light Source for EUV Mask Inspection

Other Titles

극자외선 마스크 검사용 결맞는 극자외선 광원의 출력특성

Authors

Jhon, Young Min; Kim Yong Soo; Ahn Joonmo; Sung, Hamin; Cho, Woon Jo; Park, Min-Chul; Kim, Jomsool; Lee, Ju Han; KIM, JAE HUN; MINAH SEO; Lee, Seok; Kim, Yong Tae

Citation

차세대 리소그래피 학술대회, pp.57 - 58

Keywords

EUV; Mask Inspection; Coherent

URI

https://pubs.kist.re.kr/handle/201004/91106

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KIST Conference Paper > Others

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