실리콘 나노선 제조 방법

Author
김영환김상헌김용태김춘근김성일
Assignee
한국과학기술연구원
Regitration Date
2012-08-02
Registration No.
1172358
Application Date
2010-03-05
Application No.
2010-0020115
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/92997
Appears in Collections:
KIST Patent > 2010
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